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Interaction of a plasma with a hole ...

Kim, Chang-Koo.

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Interaction of a plasma with a hole having diameter larger than the sheath thickness.

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Interaction of a plasma with a hole having diameter larger than the sheath thickness./
Author:	Kim, Chang-Koo.
Description:	163 p.
Notes:	Source: Dissertation Abstracts International, Volume: 62-09, Section: B, page: 4176.
Contained By:	Dissertation Abstracts International62-09B.
Subject:	Engineering, Chemical. -
Online resource:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3025725
ISBN:	9780493374864

Interaction of a plasma with a hole having diameter larger than the sheath thickness.
Kim, Chang-Koo.

Interaction of a plasma with a hole having diameter larger than the sheath thickness. - 163 p.

Source: Dissertation Abstracts International, Volume: 62-09, Section: B, page: 4176.

Thesis (Ph.D.)--University of Houston, 2000.

Understanding interaction of a plasma with a hole on a solid wall bounding that plasma finds applications in plasma "molding" over surface topography and ion extraction from a plasma by electrically biased grids. The flux, energy and angular distributions of the extracted ions depend critically on the shape of the plasma-sheath "meniscus" formed over the holes.

ISBN: 9780493374864Subjects--Topical Terms:

1018531
Engineering, Chemical.

Interaction of a plasma with a hole having diameter larger than the sheath thickness.
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020 $a 9780493374864
035 $a (UMI)AAI3025725
035 $a AAI3025725
040 $a UMI $c UMI
100 1 $a Kim, Chang-Koo. $3 1675548
245 1 0 $a Interaction of a plasma with a hole having diameter larger than the sheath thickness.
300 $a 163 p.
500 $a Source: Dissertation Abstracts International, Volume: 62-09, Section: B, page: 4176.
500 $a Adviser: Demetre J. Economou.
502 $a Thesis (Ph.D.)--University of Houston, 2000.
520 $a Understanding interaction of a plasma with a hole on a solid wall bounding that plasma finds applications in plasma "molding" over surface topography and ion extraction from a plasma by electrically biased grids. The flux, energy and angular distributions of the extracted ions depend critically on the shape of the plasma-sheath "meniscus" formed over the holes.
520 $a In this work, an experimental system and a methodology were developed to investigate plasma-hole interaction in argon and deuterium gases. Experiments were conducted by varying the sheath thickness (Debye length) and the hole diameter and aspect ratio. In contrast to reported studies, holes with diameter larger than as well as smaller than the sheath thickness were used.
520 $a At one extreme, when the hole diameter (10 mum) was much less than the sheath thickness, the plasma was not perturbed by the presence of the hole. The ion energy distribution (IED) had multiple peaks due to ions experiencing the instantaneous potential while crossing the sheath. The ion angular distribution (IAD) was Gaussian, peaking at zero angle with respect to the surface normal. These results agree with reported studies.
520 $a At the other extreme, when the hole diameter (1270 mum) was larger than the sheath thickness, plasma "leaked" through the hole. The IED had a single peak since ions now experience an average sheath potential. The IAD was quite broad extending up to 30 degrees off normal. The IAD was not affected by increasing power (decreasing sheath thickness) suggesting that the plasma leaked completely out of the hole.
520 $a When the hole diameter (508 mum) was comparable to the sheath thickness, the shape of the IED was in-between the two extremes mentioned above. The shape of the IAD was also in-between the two extremes, but the IAD became more isotropic with increasing power, suggesting that the plasma leaked only partly through the hole (the plasma-sheath meniscus was located inside the hole). The IAD was nearly unchanged with pressure because two competing factors (ion neutral collisions and the degree of plasma leakage) apparently counterbalanced each other as pressure was varied.
520 $a For all cases, increasing pressure resulted in lower ion energy in argon plasmas due to ion neutral collisions. Increasing pressure had no effect on the ion energy for deuterium plasmas, for hole diameter less than 508 mum. This is due to the much smaller ion-neutral collision cross section for deuterium.
520 $a The hole aspect ratio had no significant effect on the IED. When the hole aspect ratio was increased, however, the IAD dropped to zero faster because ions in the wings of the distribution collided with the hole sidewalls and neutralized.
590 $a School code: 0087.
650 4 $a Engineering, Chemical. $3 1018531
650 4 $a Physics, Fluid and Plasma. $3 1018402
650 4 $a Engineering, Materials Science. $3 1017759
690 $a 0542
690 $a 0759
690 $a 0794
710 2 $a University of Houston. $3 1019266
773 0 $t Dissertation Abstracts International $g 62-09B.
790 1 0 $a Economou, Demetre J., $e advisor
790 $a 0087
791 $a Ph.D.
792 $a 2000
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=3025725