東華大學圖書館 |

Language: English

Help

回圖書館首頁

手機版館藏查詢

Back

Switch To: Labeled | MARC Mode | ISBD

Principles of physical vapor deposit...

SreeHarsha, K. S.

Linked to FindBook

Google Book

Amazon

博客來

Principles of physical vapor deposition of thin films

Record Type:	Electronic resources : Monograph/item
Title/Author:	Principles of physical vapor deposition of thin films/ K.S. Sree Harsha.
Author:	SreeHarsha, K. S.
Published:	Amsterdam ;Elsevier, : 2006.,
Description:	1 online resource (xi, 1160 p.) :ill.
Subject:	Thin films. -
Online resource:	http://www.sciencedirect.com/science/book/9780080446998
ISBN:	9780080446998

Principles of physical vapor deposition of thin films
SreeHarsha, K. S.

Principles of physical vapor deposition of thin films[electronic resource] /K.S. Sree Harsha. - 1st ed. - Amsterdam ;Elsevier,2006. - 1 online resource (xi, 1160 p.) :ill.

Includes bibliographical references and index.

The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible. * Offers detailed derivation of important formulae. * Thoroughly covers the basic principles of materials science that are important to any thin film preparation. * Careful attention to terminologies, concepts and definitions, as well as abundance of illustrations offer clear support for the text.

ISBN: 9780080446998

Source: 112953:113041Elsevier Science & Technologyhttp://www.sciencedirect.comSubjects--Topical Terms:

626403
Thin films.
Index Terms--Genre/Form:

542853
Electronic books.

LC Class. No.: QC176.83 / .S68 2006eb

Dewey Class. No.: 621.38152

Principles of physical vapor deposition of thin films
LDR:02040cmm 2200301Ia 4500 001 1324715
005 20120813072759.0
006 m d
007 cr cn|||||||||
008 130118s2006 ne a fob 001 0 eng d
020 $a 9780080446998
020 $a 008044699X
029 1 $a NZ1 $b 12434769
029 1 $a DEBBG $b BV039832586
035 $a ocn162568390
037 $a 112953:113041 $b Elsevier Science & Technology $n http://www.sciencedirect.com
040 $a OPELS $b eng $c OPELS $d OCLCQ
049 $a NTYA
050 4 $a QC176.83 $b .S68 2006eb
082 0 4 $a 621.38152 $2 22
100 1 $a SreeHarsha, K. S. $3 650104
245 1 0 $a Principles of physical vapor deposition of thin films $h [electronic resource] / $c K.S. Sree Harsha.
250 $a 1st ed.
260 $a Amsterdam ; $a Boston ; $a London : $b Elsevier, $c 2006.
300 $a 1 online resource (xi, 1160 p.) : $b ill.
504 $a Includes bibliographical references and index.
520 $a The goal of producing devices that are smaller, faster, more functional, reproducible, reliable and economical has given thin film processing a unique role in technology. Principles of Vapor Deposition of Thin Films brings in to one place a diverse amount of scientific background that is considered essential to become knowledgeable in thin film depostition techniques. Its ultimate goal as a reference is to provide the foundation upon which thin film science and technological innovation are possible. * Offers detailed derivation of important formulae. * Thoroughly covers the basic principles of materials science that are important to any thin film preparation. * Careful attention to terminologies, concepts and definitions, as well as abundance of illustrations offer clear support for the text.
588 $a Description based on print version record.
650 0 $a Thin films. $3 626403
650 0 $a Vapor-plating. $3 717983
650 6 $a Couches minces. $3 860023
650 6 $a D{acute}ep{circ}ot en phase vapeur. $3 1611702
655 4 $a Electronic books. $2 lcsh $3 542853
776 0 8 $i Print version: $a SreeHarsha, K. S. $t Principles of physical vapor deposition of thin films. $b 1st ed. $d Amsterdam ; Boston ; London : Elsevier, 2006 $z 008044699X $z 9780080446998 $w (DLC) 2005937842 $w (OCoLC)61217411
856 4 0 $3 ScienceDirect $u http://www.sciencedirect.com/science/book/9780080446998