Languages
Rossnagel, Stephen M.
Overview
| Works: | 1 works in 1 publications in 1 languages | |
|---|---|---|
Titles
Handbook of plasma processing technology : = fundamentals, etching, deposition, and surface interactions /
by:
Rossnagel, Stephen M.; Cuomo, J. J.; Westwood, William D. (1937-)
(Language materials, printed)
PVD for microelectronics = sputter deposition applied to semiconductor manufacturing /
by:
Powell, Ronald A.; Rossnagel, Stephen M.
(Electronic resources)