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Photonic microsystems = micro and nanotechnology applied to optical devices and systems /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Photonic microsystems/ by Olav Solgaard.
Reminder of title:	micro and nanotechnology applied to optical devices and systems /
Author:	Solgaard, Olav.
Published:	Boston, MA :Springer-Verlag US, : 2009.,
Description:	xvi, 631 p. :ill., digital ;24 cm.
Series:	MEMS reference shelf,
Contained By:	Springer eBooks
Subject:	Microelectromechanical systems. -
Online resource:	http://dx.doi.org/10.1007/978-0-387-68351-5
ISBN:	9780387290225 (paper)

Photonic microsystems = micro and nanotechnology applied to optical devices and systems /
Solgaard, Olav.

Photonic microsystemsmicro and nanotechnology applied to optical devices and systems /[electronic resource] :by Olav Solgaard. - Boston, MA :Springer-Verlag US,2009. - xvi, 631 p. :ill., digital ;24 cm. - MEMS reference shelf,1936-4407.

ISBN: 9780387290225 (paper)Subjects--Topical Terms:

567138
Microelectromechanical systems.

LC Class. No.: TK7875 / .S65 2009

Dewey Class. No.: 621.381045

Photonic microsystems = micro and nanotechnology applied to optical devices and systems /
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020 $a 9780387683515 (electronic bk.)
035 $a 978-0-387-29022-5
050 4 $a TK7875 $b .S65 2009
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100 1 $a Solgaard, Olav. $3 1005736
245 1 0 $a Photonic microsystems $h [electronic resource] : $b micro and nanotechnology applied to optical devices and systems / $c by Olav Solgaard.
260 $a Boston, MA : $c 2009. $b Springer-Verlag US,
300 $a xvi, 631 p. : $b ill., digital ; $c 24 cm.
440 0 $a MEMS reference shelf, $x 1936-4407
650 0 $a Microelectromechanical systems. $3 567138
650 0 $a Optical communications. $3 543301
650 0 $a Optoelectronic devices $x Design and construction. $3 719088
650 0 $a Photonics. $3 526247
650 1 4 $a Engineering. $3 586835
650 2 4 $a Applied Optics, Optoelectronics, Optical Devices. $3 893983
650 2 4 $a Circuits and Systems. $3 896527
650 2 4 $a Nanotechnology and Microengineering. $3 1005737
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