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Integrated Chemical Microsensor Syst...

Baltes, H..

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Integrated Chemical Microsensor Systems in CMOS Technology

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Integrated Chemical Microsensor Systems in CMOS Technology/ by Andreas Hierlemann ; edited by H. Baltes, Hiroyuki Fujita, Dorian Liepmann.
Author:	Hierlemann, Andreas.
other author:	Baltes, H..
Published:	Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg, : 2005.,
Description:	ix, 229 p. :ill., digital ;25 cm.
Series:	Microtechnology and MEMS,
Contained By:	Springer e-books
Subject:	Metal oxide semiconductors, Complementary. -
Online resource:	http://dx.doi.org/10.1007/b138987http://dx.doi.org/10.1007/b138987
ISBN:	9783540237822 (paper)

Integrated Chemical Microsensor Systems in CMOS Technology
Hierlemann, Andreas.

Integrated Chemical Microsensor Systems in CMOS Technology[electronic resource] /by Andreas Hierlemann ; edited by H. Baltes, Hiroyuki Fujita, Dorian Liepmann. - Berlin, Heidelberg :Springer-Verlag Berlin Heidelberg,2005. - ix, 229 p. :ill., digital ;25 cm. - Microtechnology and MEMS,1615-8326.

ISBN: 9783540237822 (paper)Subjects--Topical Terms:

649504
Metal oxide semiconductors, Complementary.

LC Class. No.: TK7875 / .H54 2005

Dewey Class. No.: 621.39732

Integrated Chemical Microsensor Systems in CMOS Technology
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005 20080716
006 m d
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008 080716s2005 gw j eng d
020 $a 9783540237822 (paper)
020 $a 9783540273721 (electronic bk.)
035 $a 978-3-540-23782-2
040 $a NDHU $c NDHU $d NDHU
050 0 0 $a TK7875 $b .H54 2005
082 0 0 $a 621.39732 $2 22
100 $a Hierlemann, Andreas. $3 894257
245 1 0 $a Integrated Chemical Microsensor Systems in CMOS Technology $h [electronic resource] / $c by Andreas Hierlemann ; edited by H. Baltes, Hiroyuki Fujita, Dorian Liepmann.
260 $a Berlin, Heidelberg : $c 2005. $b Springer-Verlag Berlin Heidelberg,
300 $a ix, 229 p. : $b ill., digital ; $c 25 cm.
440 0 $a Microtechnology and MEMS, $x 1615-8326
650 $a Metal oxide semiconductors, Complementary. $3 649504
650 $a Microelectromechanical systems. $3 567138
650 $a Sensorimotor integration. $3 625776
650 $a Chemistry. $3 516420
650 $a Analytical Chemistry. $3 890839
650 $a Electronics and Microelectronics, Instrumentation. $3 893838
650 $a Measurement Science, Instrumentation. $3 894003
650 $a Nanotechnology. $3 526235
650 $a Optical and Electronic Materials. $3 891120
650 $a Surfaces and Interfaces, Thin Films. $3 892408
700 $a Baltes, H.. $3 894254
700 $a Fujita, Hiroyuki. $3 894255
700 $a Liepmann, Dorian. $3 894256
710 $a SpringerLink (Online service) $3 836513
773 0 $t Springer e-books
856 4 0 $u http://dx.doi.org/10.1007/b138987 $z http://dx.doi.org/10.1007/b138987
950 $a Chemistry and Materials Science (Springer-11644; ZDB-2-CMS)