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Precursor Chemistry of Advanced Mate...

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Fischer, Roland A.

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Precursor Chemistry of Advanced Materials = CVD, ALD and Nanoparticles /

Record Type:	Language materials, printed : Monograph/item
Title/Author:	Precursor Chemistry of Advanced Materials/ edited by Roland A. Fischer.
Reminder of title:	CVD, ALD and Nanoparticles /
other author:	Fischer, Roland A.
Published:	Berlin Heidelberg :Springer-Verlag GmbH., : 2005,
Description:	xv, 213 p. :ill., digital ;25 cm.
Series:	Topics in Organometallic Chemistry,
Contained By:	Springer e-books
Subject:
Online resource:	http://dx.doi.org/10.1007/b75019http://dx.doi.org/10.1007/b75019
ISBN:	9783540016052 (paper)

Precursor Chemistry of Advanced Materials = CVD, ALD and Nanoparticles /
Precursor Chemistry of Advanced MaterialsCVD, ALD and Nanoparticles /[electronic resource] :edited by Roland A. Fischer. - Berlin Heidelberg :Springer-Verlag GmbH.,2005 - xv, 213 p. :ill., digital ;25 cm. - Topics in Organometallic Chemistry,91436-6002 ;.

ISBN: 9783540016052 (paper)Subjects--Topical Terms:

516159

LC Class. No.: QD411.7.S94 / P74 2005

Dewey Class. No.: 547.05

Precursor Chemistry of Advanced Materials = CVD, ALD and Nanoparticles /
LDR:00887nam a2200241 a 45 001 764296
003 Springer
005 20080716
006 m d
007 cr nn 008maaau
008 080716s2005 gw j eng d
020 $a 9783540016052 (paper)
020 $a 9783540314516 (electronic bk.)
035 $a 978-3-540-01605-2
040 $a NDHU $c NDHU $d NDHU
050 0 0 $a QD411.7.S94 $b P74 2005
082 0 0 $a 547.05 $2 22
245 0 0 $a Precursor Chemistry of Advanced Materials $h [electronic resource] : $b CVD, ALD and Nanoparticles / $c edited by Roland A. Fischer.
260 $a Berlin Heidelberg : $c 2005 $b Springer-Verlag GmbH.,
300 $a xv, 213 p. : $b ill., digital ; $c 25 cm.
440 0 $a Topics in Organometallic Chemistry, $x 1436-6002 ; $v 9
650 $2 lcstt. $3 516159
650 $a Chemistry. $3 516420
650 $a Inorganic Chemistry. $3 890827
650 $a Materials Science. $3 890867
650 $a Organometallic Chemistry. $3 892407
650 $a Physical Chemistry. $3 890828
650 $a Surfaces and Interfaces, Thin Films. $3 892408
700 $a Fischer, Roland A. $3 621054
710 $a SpringerLink (Online service) $3 836513
773 0 $t Springer e-books
856 4 0 $u http://dx.doi.org/10.1007/b75019 $z http://dx.doi.org/10.1007/b75019
950 $a Chemistry and Materials Science (Springer-11644; ZDB-2-CMS)

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