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Materials and failures in MEMS and NEMS

Tiwari, Atul.

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Materials and failures in MEMS and NEMS

紀錄類型:	書目-電子資源 : Monograph/item
正題名/作者:	Materials and failures in MEMS and NEMS/ edited by Atul Tiwari and Baldev Raj.
其他作者:	Tiwari, Atul.
出版者:	Hoboken, NJ :John Wiley & Sons ; : c2015.,
面頁冊數:	1 online resource (xiv, 406 p.)
Subject:	Microelectromechanical systems - Design and construction. -
Online resource:	http://onlinelibrary.wiley.com/book/10.1002/9781119083887
ISBN:	9781119083887 (electronic bk.)

Materials and failures in MEMS and NEMS
Materials and failures in MEMS and NEMS[electronic resource] /edited by Atul Tiwari and Baldev Raj. - 1st ed. - Hoboken, NJ :John Wiley & Sons ;c2015. - 1 online resource (xiv, 406 p.) - Materials degradation and failures series. - Materials degradation and failure series..

Includes bibliographical references and index.

ISBN: 9781119083887 (electronic bk.)

LCCN: 2015027730Subjects--Topical Terms:

753820
Microelectromechanical systems
--Design and construction.

LC Class. No.: TK7875 / .M3745 2015

Dewey Class. No.: 621.381

Materials and failures in MEMS and NEMS
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490 1 $a Materials degradation and failures series
504 $a Includes bibliographical references and index.
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