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A thermodynamic field formulation fo...

Enikov, Eniko Todorov.

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A thermodynamic field formulation for anodic bonding of microelectromechanical systems (MEMS).

Record Type:	Electronic resources : Monograph/item
Title/Author:	A thermodynamic field formulation for anodic bonding of microelectromechanical systems (MEMS)./
Author:	Enikov, Eniko Todorov.
Description:	128 p.
Notes:	Source: Dissertation Abstracts International, Volume: 59-12, Section: B, page: 6373.
Contained By:	Dissertation Abstracts International59-12B.
Subject:	Engineering, Mechanical. -
Online resource:	http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=9914987
ISBN:	0599136979

A thermodynamic field formulation for anodic bonding of microelectromechanical systems (MEMS).
Enikov, Eniko Todorov.

A thermodynamic field formulation for anodic bonding of microelectromechanical systems (MEMS). - 128 p.

Source: Dissertation Abstracts International, Volume: 59-12, Section: B, page: 6373.

Thesis (Ph.D.)--University of Illinois at Chicago, 1998.

An anodic bond is modeled as a moving nonmaterial line forming the intersection of three material surfaces representing the unbonded conductor, the unbonded insulator, and the bonded interface. Global integral equations are written for the conservation of mass, momentum, and energy, Maxwell's equations, and the second law of thermodynamics. The global equations are then localized in the volume, the material surfaces, and the nonmaterial bond line. The second law is used to determine the thermodynamic conjugates in the thermodynamic potential and the dissipation inequality. It is demonstrated that the jump in the Poynting vector across a surface is equal to the surface Joule heating due to surface electric conduction currents.

ISBN: 0599136979Subjects--Topical Terms:

783786
Engineering, Mechanical.

A thermodynamic field formulation for anodic bonding of microelectromechanical systems (MEMS).
LDR:02260nmm 2200325 4500 001 1841292
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008 130614s1998 eng d
020 $a 0599136979
035 $a (UnM)AAI9914987
035 $a AAI9914987
040 $a UnM $c UnM
100 1 $a Enikov, Eniko Todorov. $3 1929598
245 1 2 $a A thermodynamic field formulation for anodic bonding of microelectromechanical systems (MEMS).
300 $a 128 p.
500 $a Source: Dissertation Abstracts International, Volume: 59-12, Section: B, page: 6373.
500 $a Adviser: James Boyd.
502 $a Thesis (Ph.D.)--University of Illinois at Chicago, 1998.
520 $a An anodic bond is modeled as a moving nonmaterial line forming the intersection of three material surfaces representing the unbonded conductor, the unbonded insulator, and the bonded interface. Global integral equations are written for the conservation of mass, momentum, and energy, Maxwell's equations, and the second law of thermodynamics. The global equations are then localized in the volume, the material surfaces, and the nonmaterial bond line. The second law is used to determine the thermodynamic conjugates in the thermodynamic potential and the dissipation inequality. It is demonstrated that the jump in the Poynting vector across a surface is equal to the surface Joule heating due to surface electric conduction currents.
520 $a A finite element code was written to solve the governing equations in 2D. The electrostatic body forces are accounted through the Maxwell's stress tensor. One-dimensional boundary elements are used to insure the boundary continuity of total electro-mechanical and electrostatic flux across the bond interface.
520 $a It is shown that a field formulation of anodic bonding allows for prediction of its effects on the overall structure of a MEMS, including thermoelastic residual stresses, space charge retention and deformation due to creep of the glass.
590 $a School code: 0799.
650 4 $a Engineering, Mechanical. $3 783786
650 4 $a Applied Mechanics. $3 1018410
650 4 $a Engineering, Electronics and Electrical. $3 626636
650 4 $a Engineering, Materials Science. $3 1017759
690 $a 0548
690 $a 0346
690 $a 0544
690 $a 0794
710 2 0 $a University of Illinois at Chicago. $3 1020478
773 0 $t Dissertation Abstracts International $g 59-12B.
790 1 0 $a Boyd, James, $e advisor
790 $a 0799
791 $a Ph.D.
792 $a 1998
856 4 0 $u http://pqdd.sinica.edu.tw/twdaoapp/servlet/advanced?query=9914987